Shkel ”Inherently Robust Micromachined Gyroscopes With 2 DOF Sense-Mode Oscillator

Abstract—Commercialization of reliable vibratory microma-chined gyroscopes for high-volume applications has proven to be extremely challenging, primarily due to the high sensitivity of the dynamical system response to fabrication and environmental vari-ations. This paper reports a novel micromachined gyroscope with two degrees-of-freedom (DOF) sense-mode oscillator that provides inherent robustness against structural parameter variations. The 2-DOF sense-mode oscillator provides a frequency response with two resonant peaks and a flat region between the peaks, instead of a single resonance peak as in conventional gyroscopes. The device is nominally operated in the flat region of the sense-mode response curve, where the amplitude and phase of the response are insensitive to parameter fluctuations. Furthermore, the sensitivity is improved by utilizing dynamical amplification of oscillations in the 2-DOF sense-mode oscillator. Thus, improved robustness to variations in temperature, damping, and structural parameters is achieved, solely by the mechanical system design. Prototype gyroscopes were fabricated using a bulk-micromachining process, and the performance and robustness of the devices have been experimentally evaluated. With a 25 V dc bias and 3 V ac drive signal resulting in 5.8 m drive-mode amplitude, the gyroscope exhibited a measured noise-floor of 0.64 s Hz over 50 Hz bandwidth in atmospheric pressure. The sense-mode response in the flat operating region was also experimentally demonstrated to be inherently insensitive to pressure, temperature, and dc bias variations. [1501] Index Terms—Inertial sensor, MEMS gyroscope, microma-chined gyroscope, rate sensor. I